Turntable for rotating a wafer carrier

Details Turntable for rotating a wafer carrier Turntable for rotating a wafer carrier

1993-12-10

1997-09-23

Niebling, John

Horizontally supported planar surfaces

Horizontally adjustable

Rotates about vertical axis

108 22, 156345, 156625, 156639, 134 33, 269 57, 269 71, 269903, A47B 1100

Patent

active

056693168

ABSTRACT:
A turntable for rotating a wafer carrier in order to enable the attachment of a handle to the wafer carrier. The turntable includes a platform rotatably mounted to a baseplate. In addition, the turntable includes stops which are positioned to enable 180.degree. clockwise and counterclockwise rotation of the platform to provide access to the wafer carrier for handle attachment. The platform includes carrier guides which are spaced apart to accommodate the wafer carrier. The platform further includes a platform handle which an operator manipulates to rotate the platform.

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