Metal working – Plural diverse manufacturing apparatus including means for... – Multiple-tool holder
Reexamination Certificate
2006-03-28
2006-03-28
Cadugan, Erica (Department: 3722)
Metal working
Plural diverse manufacturing apparatus including means for...
Multiple-tool holder
C407S067000, C407S069000, C407S070000, C407S117000, C407S113000
Reexamination Certificate
active
07017246
ABSTRACT:
Disclosed is a turning tool for cutting circumferential grooves into a surface of a polishing pad formed of a resin material and utilized for polishing semiconductor devices. The turning tool comprising a cutting part arranged to have a tooth width within a range of 0.005–1.0 mm, a wedge angle within a range of 15–35 degrees, and a front clearance angle within a range of 65–45 degrees. A polishing pad effectively formed by using the turning tool, and an apparatus and a method of producing such a polishing pad by utilizing the turning tool are also disclosed.
REFERENCES:
patent: 798856 (1905-09-01), Wetter
patent: 1410451 (1922-03-01), Bullard et al.
patent: 1416843 (1922-05-01), Labonte
patent: RE25955 (1966-02-01), Emmons
patent: 3466721 (1969-09-01), Binns
patent: 4063841 (1977-12-01), Niman, Jr.
patent: 4474721 (1984-10-01), Carpenter
patent: 5031491 (1991-07-01), Hofmann
patent: 5067377 (1991-11-01), Dona et al.
patent: 5205678 (1993-04-01), Britsch et al.
patent: 5370023 (1994-12-01), Morgan et al.
patent: 5398458 (1995-03-01), Henriksen et al.
patent: 5921855 (1999-07-01), Osterheld et al.
patent: 5984769 (1999-11-01), Bennett et al.
patent: 6206759 (2001-03-01), Agarwal et al.
patent: 6227771 (2001-05-01), Lagerberg et al.
patent: 6238271 (2001-05-01), Cesna
patent: 6241585 (2001-06-01), White
patent: 6340325 (2002-01-01), Chen et al.
patent: 6406363 (2002-06-01), Xu et al.
patent: 6439989 (2002-08-01), Reinhardt et al.
patent: 6488575 (2002-12-01), Agarwal et al.
patent: 6544104 (2003-04-01), Koike et al.
patent: 6561891 (2003-05-01), Eppert, Jr. et al.
patent: 6572445 (2003-06-01), Laursen
patent: 6602436 (2003-08-01), Mandigo et al.
patent: 6632129 (2003-10-01), Goetz
patent: 6641471 (2003-11-01), Pinheiro et al.
patent: 6656019 (2003-12-01), Chen et al.
patent: 6656030 (2003-12-01), Xu et al.
patent: 6685548 (2004-02-01), Chen et al.
patent: 6688957 (2004-02-01), Tolles
patent: 6736714 (2004-05-01), Dudovicz
patent: 6758735 (2004-07-01), Blalock
patent: 6852020 (2005-02-01), Petroski et al.
patent: 2003/0003857 (2003-01-01), Shimagaki et al.
patent: 2004/0014413 (2004-01-01), Kawahashi et al.
patent: 47-16044 (1972-06-01), None
patent: 63-22002 (1988-06-01), None
patent: 11-70463 (1999-03-01), None
patent: 2000-94303 (2000-04-01), None
The Science of CMP; Aug. 20, 1997; pp. 113-119; Chapter 4, Part III “Structure and Feature of the polishing pad”.
Cadugan Erica
Rossi Kimms & McDowell LLP
Toho Engineering Kabushiki Kaisha
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