Abrading – Machine – Rotary tool
Reexamination Certificate
2005-03-22
2005-03-22
Morgan, Eileen P. (Department: 3723)
Abrading
Machine
Rotary tool
C451S246000, C451S249000, C083S875000
Reexamination Certificate
active
06869343
ABSTRACT:
Disclosed is a turning tool for cutting circumferential grooves into a surface of a polishing pad formed of a resin material and utilized for polishing semiconductor devices. The turning tool comprising a cutting part arranged to have a tooth width within a range of 0.005-1.0 mm, a wedge angle within a range of 15-35 degrees, and a front clearance angle within a range of 65-45 degrees. A polishing pad effectively formed by using the turning tool, and an apparatus and a method of producing such a polishing pad by utilizing the turning tool are also disclosed.
REFERENCES:
patent: 5398458 (1995-03-01), Henriksen et al.
patent: 5921855 (1999-07-01), Osterheld et al.
patent: 5984769 (1999-11-01), Bennett et al.
patent: 6238271 (2001-05-01), Cesna
patent: 6241585 (2001-06-01), White
patent: 6561891 (2003-05-01), Eppert, Jr. et al.
patent: 6572445 (2003-06-01), Laursen
patent: 6602436 (2003-08-01), Mandigo et al.
patent: 6641471 (2003-11-01), Pinheiro et al.
patent: 47-16044 (1972-06-01), None
patent: 63-22002 (1988-06-01), None
patent: 11-70463 (1999-03-01), None
patent: 2000-94303 (2000-04-01), None
The Science fo CMP; Aug. 20, 1997; pp. 113-119; Chapter 4, Part III “Structure and Feature of the polishing pad”.
Morgan Eileen P.
Rossi & Associates
Toho Engineering Kabushiki Kaisha
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