Turning-over machine and polishing apparatus

Details Turning-over machine and polishing apparatus Turning-over machine and polishing apparatus

1997-10-09

1999-08-31

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

216 88, 438691, H01L 2100

Patent

active

059449411

ABSTRACT:
The present invention provides a dry/wet work turning-over machine which can be used with both a dry hand and a wet hand and in which, even when the dry hand having a vacuum suction mechanism is inserted into a water-proof cover surrounding a work turning-over device, liquid is not adhered to the hand. In the dry/wet work turning-over machine, the work turning-over device is surrounded by the water-proof cover. An opening is formed in the water-proof cover at an upper surface of a front side thereof and a front part of an upper surface thereof. A screen for closing the opening is attached to the opening. The screen is rotated in a downward direction by a rotation driving mechanism.

REFERENCES:
patent: 4950392 (1990-08-01), Tiegs et al.
patent: 5316620 (1994-05-01), Hasegawa et al.
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5618227 (1997-04-01), Tsutsumi et al.
Patent Abstracts of Japan, vol. 009, No. 230 (E-343), Sep. 17, 1985 & JP 60 084823 A (Mitsubishi Denki KK), May 14, 1985 * abstract *.
Patent Abstracts of Japan, vol. 096, No. 010, Oct. 31, 1996 & JP 08 153697 A (Toshiba Mach Co Ltd; Toshiba Corp) Jun. 11, 1996 * abstract *.

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