Turbomolecular vacuum pump with the rotor and stator vanes

Details Turbomolecular vacuum pump with the rotor and stator vanes Turbomolecular vacuum pump with the rotor and stator vanes

2005-06-28

2005-06-28

Look, Edward K. (Department: 3745)

Rotary kinetic fluid motors or pumps

Working fluid passage or distributing means associated with...

Vane or deflector

C416S242000

Reexamination Certificate

active

06910861

ABSTRACT:
A turbomolecular vacuum pump (1) has an inlet (3) and an outlet (4) and rotor and stator vanes (5and6), situated between the inlet and outlet. The rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation. At least a part of the rotor vanes (6) have a rear side (12) which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes (6) have a front side (11), which is concave on the suction side and convex on the delivery side.

REFERENCES:
patent: 2484554 (1949-10-01), Concordia et al.
patent: 3128939 (1964-04-01), Szydlowski
patent: 4227855 (1980-10-01), Flynn et al.
patent: 4653976 (1987-03-01), Blair et al.
patent: 6499942 (2002-12-01), Nonaka et al.
patent: 72 37362 (1973-01-01), None
patent: 0 829 645 (1998-03-01), None
patent: 1 004 775 (2000-05-01), None
patent: 1019272 (1966-02-01), None

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