Turbomolecular vacuum pump having virtually zero power magnetic

Pumps – Motor driven – Electric or magnetic motor

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308 10, F04B 3504, F16C 3500

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active

043126286

ABSTRACT:
A turbomolecular vacuum pump utilizes a virtually zero power magnetic bearing assembly with a single axis sevo control and has an optimized L/D ratio and an optimized number of pole faces. In such a structure, radial stiffness is low and radial damping is high so that single axis control is possible. A frusto-conical mechanical bearing structure is shown as a fail-safe back-up for the magnetic suspension system taught.

REFERENCES:
patent: 3428371 (1969-02-01), Lyman
patent: 3473852 (1969-10-01), Lyman
patent: 3731984 (1973-05-01), Habermann
patent: 3860300 (1975-01-01), Lyman
patent: 4023920 (1977-05-01), Buchler
Vacuum Technology, "Research/Development", Mar. 1977, vol. 28, No. 3, p. 57ff.
"TurboVac 550M", Leybold-Heraeus Sales Literature.

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