Turbomolecular vacuum pump

Pumps – Motor driven – Electric or magnetic motor

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Details

4174237, F04D 1904

Patent

active

055428258

ABSTRACT:
A turbomolecular pump comprising a stator and a rotor, said rotor comprising a central shaft and a bell-shaped active portion, said stator comprising an outer portion and an inner portion that penetrates into the cavity of said bell-shaped active portion, and that supports the stator portion of the drive motor, the shaft of said rotor supporting the rotor portion of said drive motor, wherein said central shaft and the bell-shaped active portion of the rotor are made in one piece, without any assembly being necessary, and of a non-magnetic material, said shaft being provided with a central bore which receives the rotor portion of said drive motor, which portion is constituted by a cylindrical permanent magnet.

REFERENCES:
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patent: 4111595 (1978-09-01), Becker et al.
patent: 4433261 (1984-02-01), Nashiki et al.
patent: 4588914 (1986-05-01), Heyne
patent: 4629921 (1986-12-01), Gavaletz
patent: 4725750 (1988-02-01), Welch
patent: 4787829 (1988-11-01), Miyazaki et al.
patent: 5059092 (1991-10-01), Kabelite et al.
patent: 5106273 (1992-04-01), Lemarquand et al.
patent: 5152679 (1992-10-01), Kanemitsu et al.
patent: 5350275 (1994-09-01), Ishimaru

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