Refrigeration – Low pressure cold trap process and apparatus
Patent
1989-03-03
1990-05-22
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
415 90, 417901, B01D 800
Patent
active
049266489
ABSTRACT:
A turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port. The pump further has a heat exchanger provided inside the suction port, the heat exchanger being connected to a refrigerator through a refrigerant pipe and a gate valve provided on the upstream side of the suction port. Gases having low molecular weights, particularly water vapor, are freeze-trapped on the heat exchanger. Thus, it is possible to efficiently exhaust gases having low molecular weights, particularly water vapor, and hence to obtain a high vacuum of good quality. In addition, it is easy to start and suspend operation of the system and possible to run it on a continuous basis.
REFERENCES:
patent: 3149775 (1964-09-01), Pagano
patent: 3396548 (1968-08-01), Matte
patent: 3579998 (1971-05-01), Thibault
patent: 3597267 (1986-07-01), Forrest
patent: 3625019 (1971-12-01), Osterstrom
patent: 3769806 (1973-11-01), Boissin et al.
patent: 4176526 (1979-12-01), Missimer
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4535597 (1985-08-01), Missimer
Soviet Inventions Illustrated, Section P/Q, week E39, 10th Nov. 1982, class Q, No. M8488E/30, Derwent Publications Ltd., London, GB; & Su-A-881 372 (Tuzankin Yu M) 11-04-190.
Kuriyama Fumio
Murai Yukio
Okumura Katsuya
Sobukawa Hiroshi
Tsujimura Manabu
Capossela Ronald C.
Ebara Corp.
Toshiba Corp.
LandOfFree
Turbomolecular pump and method of operating the same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Turbomolecular pump and method of operating the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Turbomolecular pump and method of operating the same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2125063