Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1983-04-14

1986-04-01

Powell, Jr., Everette A.

Rotary kinetic fluid motors or pumps

Bearing, seal, or liner between runner portion and static part

415 90, F01D 136, F04D 2904

Patent

active

045795088

ABSTRACT:
A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

REFERENCES:
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4036565 (1977-07-01), Becker
patent: 4111595 (1978-09-01), Becker et al.
patent: 4147396 (1979-04-01), Lyman
patent: 4180370 (1979-12-01), Klatt et al.
patent: 4371218 (1983-02-01), Ichikawa

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