Pumps – Condition responsive control of pump drive motor – Responsive to pump or pump fluid temperature
Reexamination Certificate
2006-08-15
2006-08-15
Kim, Tae Jun (Department: 3746)
Pumps
Condition responsive control of pump drive motor
Responsive to pump or pump fluid temperature
C417S044100, C417S045000, C417S423400
Reexamination Certificate
active
07090469
ABSTRACT:
A turbomolecular pump (10) comprises a stator (12, 18), a pump rotor (20) a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output power such that the motor output power does not exceed a permissible maximum motor output power. On the stator side of the turbomolecular pump (10), temperature sensors (32–38) for measuring the stator temperature are arranged. The control device (42) comprises a maximum output power detecting device (50) that determines the permissible maximum motor output power in dependence on the measured stator temperature. Thus, the permissible maximum motor output power is not set to a constant value but always fixed in dependence on the current, measured stator temperature. Thereby, the capacity of the motor can be fully utilized as long as the measured stator temperature lies below a maximum value.
REFERENCES:
patent: 6075337 (2000-06-01), Ishii et al.
patent: 6123522 (2000-09-01), Kubo et al.
patent: 6329732 (2001-12-01), Straley
patent: 6335606 (2002-01-01), Minagawa et al.
patent: 6416290 (2002-07-01), Yamauchi
patent: 2757599 (1979-06-01), None
patent: 0 967 394 (1999-12-01), None
Blumenthal Roland
Bohry Dieter
Odendahl Heinz-Dieter
Fay Sharpe Fagan Minnich & McKee LLP
Gillan Ryan P.
Kim Tae Jun
Leybold Vakuum GmbH
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