Turbo vacuum pump with a magnetically levitated rotor and a cont

Details Turbo vacuum pump with a magnetically levitated rotor and a cont Turbo vacuum pump with a magnetically levitated rotor and a cont

1997-09-02

1999-10-05

Freay, Charles G.

Pumps

Condition responsive control of pump drive motor

In response to pump speed

417 53, 417 441, 417 4411, 415132, F04B 4902

Patent

active

059612916

ABSTRACT:
A turbo vacuum pump has a rotor and magnetic bearings. The magnetic bearings are held in a housing having a suction port and an exhaust port, and support the rotor rotatably. A peripheral flow pump stage and screw pump stage are formed in the rotor, so that the pressure at the exhaust port can be at or near atmospheric pressure level. Before starting the turbo vacuum pump, the magnetic bearings are operated to displace a rotor position and to scrape off the reaction products which have deposited inside the pump. In addition, before starting the turbo vacuum pump, a stator of the pump is heated up to decrease a binding force of the reaction products. Therefore, the pump can be restarted, even if the rotor has locked by the solidification of deposited reaction products formed during stopping of the pump.

REFERENCES:
patent: 4144986 (1979-03-01), Smith et al.
patent: 4944748 (1990-07-01), Bramm et al.
patent: 5110264 (1992-05-01), Murry
patent: 5380171 (1995-01-01), Nagaoka et al.
patent: 5501583 (1996-03-01), Nagaoka et al.
patent: 5823261 (1998-10-01), Drumheller

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