Pumps – Motor driven – Electric or magnetic motor
Reexamination Certificate
2009-11-06
2011-11-29
Freay, Charles (Department: 3746)
Pumps
Motor driven
Electric or magnetic motor
C417S423120, C417S324000
Reexamination Certificate
active
08066495
ABSTRACT:
A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
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Kawashima Hiroyasu
Ogamino Hiroaki
Sekiguchi Shinichi
Ebara Corporation
Freay Charles
Hamo Patrick
Westerman Hattori Daniels & Adrian LLP
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