Pumps – Motor driven – Electric or magnetic motor
Patent
1991-09-30
1995-09-19
Bertsch, Richard A.
Pumps
Motor driven
Electric or magnetic motor
415 90, 384109, F01D 136
Patent
active
054511470
ABSTRACT:
A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.
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Mase Masahiro
Nagaoka Takashi
Sakagami Seiji
Ueda Shinjiro
Bertsch Richard A.
Hitachi , Ltd.
Korytnyk Peter
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