Rotary kinetic fluid motors or pumps – With means for re-entry of working fluid to blade set – Cross flow runner
Patent
1986-07-30
1988-04-05
Garrett, Robert E.
Rotary kinetic fluid motors or pumps
With means for re-entry of working fluid to blade set
Cross flow runner
415 76, F04D 500
Patent
active
047355506
ABSTRACT:
According to the turbo molecular pump of the present invention, a regenerative pump is constructed by arcuate eddy current grooves having a predetermined angle with respect to the surface of the outer periphery of a rotor and which are circumferentially engraved in array in the rotor and an arcuate ventilating channel engraved in the circumferential direction in a stator, and a partition is defined in the stator circumferentially partitioning the ventilating channel, so that the working range on the low vacuum side may be extended.
REFERENCES:
patent: 2918208 (1959-12-01), Becker
patent: 3481148 (1969-12-01), Muller et al.
patent: 3849024 (1974-11-01), Masai et al.
patent: 3917431 (1975-11-01), Rose
patent: 4270882 (1981-06-01), Luijten et al.
patent: 4474530 (1984-10-01), Coffinberry
Arai Nobukatsu
Mase Masahiro
Nakamori Kazuaki
Okawada Takeshi
Ueda Shinjiro
Garrett Robert E.
Hitachi , Ltd.
Pitko Joseph M.
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