Turbo molecular pump

Details Turbo molecular pump Turbo molecular pump

1998-07-17

2000-09-26

Doerrler, William

Pumps

Motor driven

Electric or magnetic motor

417 63, 41742312, F25D 302

Patent

active

061235229

ABSTRACT:
In a turbo molecular pump having a rotor magnetically supported in a non-contact manner by a magnetic bearing, a pump controller has a magnetic bearing controller having a programmable digital signal processor. This digital signal processor not only controls the magnetic bearing, but also controls the heater, thus serving as a temperature regulator.

REFERENCES:
patent: 4717315 (1988-01-01), Miki et al.
patent: 5443368 (1995-08-01), Weeks et al.
patent: 5618167 (1997-04-01), Hirakawa et al.
patent: 5765995 (1998-06-01), Springer

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