Turbo molecular pump

Details Turbo molecular pump Turbo molecular pump

1997-11-03

1999-07-20

Lopez, F. Daniel

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415176, 415178, 4174234, F01D 136

Patent

active

059248416

ABSTRACT:
A turbo molecular pump comprising a plurality of moving blades and stationary blades arranged alternately in the axial direction in a pump casing having a gas suction port and exhaust port, a thread groove pump stage disposed on the exhaust side of the moving and stationary blades, and a spacer for fixing the position intervals of the stationary blades, characterized in that a heating apparatus includes a radiating plate is provided in a gas passage of the thread groove pump stage, and the radiating plate is connected to a heating portion located on the outside of the pump by a good heat conductor. The heating apparatus heats the gas in the thread groove pump stage to a temperature above the gas sublimation temperature.

REFERENCES:
patent: 4904155 (1990-02-01), Nagaoka et al.
patent: 5618167 (1997-04-01), Hirakawa et al.

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