Turbo-molecular pump

Details Turbo-molecular pump Turbo-molecular pump

2005-08-09

2005-08-09

Verdier, Christopher (Department: 3745)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S009000, C415S143000, C415S175000, C415S177000, C415S178000

Reexamination Certificate

active

06926493

ABSTRACT:
A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to any damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump includes a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion.

REFERENCES:
patent: 4655678 (1987-04-01), Miki
patent: 4797062 (1989-01-01), Deters et al.
patent: 4929151 (1990-05-01), Long et al.
patent: 5536148 (1996-07-01), Nishiuchi et al.
patent: 5577883 (1996-11-01), Schutz et al.
patent: 5924841 (1999-07-01), Okamura et al.
patent: 6135709 (2000-10-01), Stones
patent: 6332752 (2001-12-01), Ikegami et al.
patent: 6793466 (2004-09-01), Miyamoto
patent: 2001/0016160 (2001-08-01), Ikegami et al.
patent: 2214702 (1973-09-01), None
patent: 3402549 (1995-08-01), None
patent: 0 887 556 (1998-12-01), None
patent: 4-164187 (1962-06-01), None
patent: 59-153988 (1984-09-01), None
patent: 61-25994 (1986-02-01), None
patent: 62-29796 (1987-02-01), None
patent: 63-223394 (1988-09-01), None
patent: 63-266190 (1988-11-01), None
patent: 3-124998 (1991-05-01), None
patent: 3-290092 (1991-12-01), None
patent: 57-212395 (1992-12-01), None
patent: 06159287 (1994-06-01), None
patent: 6-40954 (1994-10-01), None
patent: 7-72558 (1995-08-01), None
patent: 08144992 (1996-06-01), None
patent: 09072293 (1997-03-01), None
patent: 187681/1997 (1997-06-01), None
patent: 09310696 (1997-12-01), None
patent: 29160/1998 (1998-01-01), None
patent: 10-252684 (1998-09-01), None
patent: 10-274189 (1998-10-01), None
patent: 11-62879 (1999-03-01), None
Japanese Utility Model Registration No. 2557551 (with English translation).

Affiliated with

Also associated with

Rating

Turbo-molecular pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Turbo-molecular pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Turbo-molecular pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3515310