Turbo-molecular pump

Details Turbo-molecular pump Turbo-molecular pump

2005-02-15

2005-02-15

Nguyen, Hoang (Department: 3748)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S143000

Reexamination Certificate

active

06854956

ABSTRACT:
A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

REFERENCES:
patent: 4655678 (1987-04-01), Miki
patent: 5417551 (1995-05-01), Abe et al.
patent: 6485254 (2002-11-01), Davis
patent: 6498410 (2002-12-01), Yashiro et al.
patent: 6575713 (2003-06-01), Ohtachi et al.
patent: 6664683 (2003-12-01), Yashiro et al.

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