Turbo-molecular pump

Details Turbo-molecular pump Turbo-molecular pump

2005-10-11

2005-10-11

Verdier, Christopher (Department: 3745)

Rotary kinetic fluid motors or pumps

Including destructible, fusible, or deformable non-reusable...

C415S090000, C415S143000

Reexamination Certificate

active

06953317

ABSTRACT:
A very safe and reliable turbo-molecular pump has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause a loss of vacuum in a vacuum processing system. The turbo-molecular pump has a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section formed by the stator and the rotor, and a constriction releasing structure for releasing the constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.

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