Turbo-molecular pump

Details Turbo-molecular pump Turbo-molecular pump

1989-03-16

1990-08-07

Look, Edward K.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415119, 74574, 188379, F01D 136

Patent

active

049463454

ABSTRACT:
The present invention provides a turbo-molecular pump in which an exhaust action is achieved by virtue of the combination of stationary blades and rotor blades adapted to rotate at high speed and to cooperate with each other to impart momentum to gaseous molecules rushing in against the blades under an extremely low-pressurized condition. Disposed inside the casing are a fixed shaft and the rotor, the latter being movably supported by a pair of active radial magnetic bearings. A motor is interposed between said pair of magnetic bearings. A dynamic damper is provided at one end of the fixed shaft to inhibit the occurrence of vibrations.

REFERENCES:
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4293136 (1981-10-01), George
patent: 4596158 (1986-06-01), Strugach
patent: 4800306 (1989-01-01), Oberto

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