Turbo-molecular pump

Details Turbo-molecular pump Turbo-molecular pump

1987-08-07

1989-05-02

Garrett, Robert E.

Rotary kinetic fluid motors or pumps

Runner has spirally arranged blade or fluid passage

Extending along runner axis

415 90, 415143, F01D 136

Patent

active

048263931

ABSTRACT:
A turbo-molecular pump comprises three distinct stages corresponding to three distinct gas flow regions. The first stage comprises a plurality of stages of alternately arranged rotor blades and stator blades, and operates in a molecular flow region wherein the gas pressure is less than 10.sup.-3 torr. The second stage comprises a first helical groove formed either on the circumference of the rotor or on the circumference of the stator. The second stage is disposed downstream of the first stage and operates in a transition flow region wherein the gas pressure is from 10.sup.-3 to 1 torr. The third stage comprises second and third helical grooves formed respectively on the circumference of the rotor and stator. The third stage is disposed downstream of the second stage and operates in a viscous flow region wherein the gas pressure is greater than 1 torr. An adequate pump compression ratio can be obtained from the ultra-high vacuum region to the low vacuum region so as to significantly widen the pump operation region.

REFERENCES:
patent: 2362922 (1944-11-01), Palm
patent: 3802794 (1974-04-01), Gehring et al.
patent: 4332522 (1982-06-01), Saulgeot
patent: 4668160 (1987-05-01), Mase et al.

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