Turbo molecular high-vacuum pump with a circular intake area

Details Turbo molecular high-vacuum pump with a circular intake area Turbo molecular high-vacuum pump with a circular intake area

2006-08-08

2006-08-08

Look, Edward K. (Department: 3745)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S102000, C415S103000, C417S423400

Reexamination Certificate

active

07086827

ABSTRACT:
In a turbo-molecular pump with a high vacuum-side induction area and of a rotational symmetrical arrangement, comprising a compressor turbine including a rotor and a stator tube having axially alternately tightly arranged rotor blade rings and stator vane rings with oppositely oriented blade and vane surfaces, a pre-vacuum chamber with a gas guide structure for the connection of a pre-pumping system, a drive module and a bearing unit, the turbo-molecular pump has a center area with a central coaxial open space extending from an ambient end to the high vacuum-side induction area and the open space is closed at its end adjacent the ambient end thereof by a flange in a vacuum-tight manner or is connected to a vacuum recipient, and the high-vacuum end of this space is separated from a pre-vacuum space.

REFERENCES:
patent: 3020102 (1962-02-01), Becker et al.
patent: 6364604 (2002-04-01), Nonaka et al.

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