Tunnel junctions for long-wavelength VCSELs

Active solid-state devices (e.g. – transistors – solid-state diode – Tunneling pn junction device

Reexamination Certificate

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Reexamination Certificate

active

06933539

ABSTRACT:
A tunnel junction device (102) with minimal hydrogen passivation of acceptors includes a p-type tunnel junction layer (106) of a first semiconductor material doped with carbon. The first semiconductor material includes aluminum, gallium, arsenic and antimony. An n-type tunnel junction layer (104) of a second semiconductor material includes indium, gallium, arsenic and one of aluminum and phosphorous. The junction between the p-type and an-type tunnel junction layers forms a tunnel junction (110).

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7thbiennial workshop onOrganometallic Vapor Phase Epitaxy, Apr. 2-6, 1995.
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“Long-wavelength VCSELs on InP grown by MOCVD”, N. Nishiyama, et al, Proceedings of SPIE vol. 5246, Aug. 2003, pp. 10-17.

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