Tuning fork vibratory MEMS gyroscope

Details Tuning fork vibratory MEMS gyroscope Tuning fork vibratory MEMS gyroscope

2007-03-20

2007-03-20

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504160, C073S504140

Reexamination Certificate

active

11070223

ABSTRACT:
A tuning fork vibratory MEMS gyroscope for sensing angular velocity and angular acceleration generated due to the rotation of a movable body. The tuning fork vibratory MEMS gyroscope includes an external fixed support portion formed on a substrate; a plurality of external elastic members; first and second external frames respectively including driving combs; first and second driving electrodes respectively including comb drivers; first and second internal elastic members respectively including a plurality of spring members; first and second internal frames respectively including sensing combs; and first and second sensing electrodes respectively including comb sensors. The tuning fork vibratory MEMS gyroscope withstands a noise at a peripheral area, is driven at the external portions of internal frames, is sensed at the internal portions of the internal frames, and comprises the elastic members having a wine glass shape, thereby being more stably operated.

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