Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-07-11
2006-07-11
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
07075218
ABSTRACT:
The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm. The tuning fork shaped crystal element is formed from a single crystal wafer by a photo-etching technique, and the side face of the tuning fork arm on which the first and second sensor electrodes are formed is a +X face of the crystal, and the first and second sensor electrodes are arranged on both sides of a protrusion ridge line section on the +X face that occurs in the lengthwise direction of the side face due to crystallinity of the crystal.
REFERENCES:
patent: 5325574 (1994-07-01), Takagi et al.
patent: 5607236 (1997-03-01), Takagi et al.
patent: 6806797 (2004-10-01), Kikushima
Katase Jun
Matsudo Hideryo
Ohtsuka Takahiro
Yotuya Shigeto
Budd Mark
Edwards Angell Palmer & & Dodge LLP
Nihon Dempa Kogyo Co. Ltd.
Wofsy Scott D.
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