Tuning fork quartz manometer

Details Tuning fork quartz manometer Tuning fork quartz manometer

1989-12-14

1991-02-26

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73708, 310338, 310370, G01L 1100

Patent

active

049952633

ABSTRACT:
The tuning fork quartz manometer has a tuning fork quartz (2) mounted in a protective casing (3) which is in turn part of a self-oscillating feedback circuit. According to the invention the protective casing (3) is inserted by means of a sealing compound (4) or directly into a hosing (5) of a measuring head (1,6) or a mounting support (15a, 20') so that the mounting support can in turn be inserted in the measuring head (1,6) and, as desired, an ideal rigid or elastic suspension is provided. A measuring circuit (20) is located directly in the measuring head close to the tuning gork quartz (2) and is thermally coupled to the latter. The measuring circuit (20) preferably has a temperature correction network (R.sub.1, R.sub.2, 22) high frequency coupled from the feedback circuit containing the tuning fork quartz.

REFERENCES:
patent: 4507970 (1985-04-01), Dinger
patent: 4644796 (1987-02-01), Ward
patent: 4747311 (1988-05-01), Hojoh
Design and Testing of a Quarty Friction Vacuum Gauge Using A Self-Oscillating Circuit by M. Hirata et al, 1987 American Vacuum Society, pp. 2393.gtoreq.2396.
Frequency Dependence of a Quartz Oscillator on Gas Pressure by K. Kokubuin et al, Jun. 3, 1985; 2985 American Vacuum Soc.
Unified Formula Describing the Impedance Dependence of a Oscillator on Gas Pressure by K. Kokubun et al; Jan. 5, 1987; American Vacuum Society.

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