Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-03-28
2006-03-28
Patel, Ramesh (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S037000, C700S044000, C700S045000, C700S121000, C700S262000, C700S263000, C700S119000, C427S008000, C427S009000, C427S585000, C205S082000, C205S083000, C205S084000
Reexamination Certificate
active
07020537
ABSTRACT:
A facility for selecting and refining electrical parameters for processing a microelectronic workpiece in a processing chamber is described. The facility initially configures the electrical parameters in accordance with either a numerical of the processing chamber or experimental data derived from operating the actual processing chamber. After a workpiece is processed with the initial parameter configuration, the results are measured and a sensitivity matrix based upon the numerical model of the processing chamber is used to select new parameters that correct for any deficiencies measured in the processing of the first workpiece. These parameters are then used in processing a second workpiece, which may be similarly measured, and the results used to further refine the parameters.
REFERENCES:
patent: 1526644 (1925-02-01), Pinney
patent: 1881713 (1932-10-01), Laukel
patent: 2256274 (1941-09-01), Boedecker et al.
patent: 3309263 (1967-03-01), Grobe
patent: 3616284 (1971-10-01), Bodmer et al.
patent: 3664933 (1972-05-01), Clauss
patent: 3706635 (1972-12-01), Kowalski
patent: 3706651 (1972-12-01), Leland
patent: 3716462 (1973-02-01), Jensen
patent: 3798003 (1974-03-01), Ensley et al.
patent: 3878066 (1975-04-01), Dettke et al.
patent: 3930963 (1976-01-01), Polichette et al.
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4000046 (1976-12-01), Weaver
patent: 4022679 (1977-05-01), Koziol et al.
patent: 4030015 (1977-06-01), Herko et al.
patent: 4046105 (1977-09-01), Gomez
patent: 4072557 (1978-02-01), Schiel
patent: 4082638 (1978-04-01), Jumer
patent: 4113577 (1978-09-01), Ross et al.
patent: 4134802 (1979-01-01), Herr
patent: 4137867 (1979-02-01), Aigo
patent: 4165252 (1979-08-01), Gibbs
patent: 4170959 (1979-10-01), Aigo
patent: 4222834 (1980-09-01), Bacon et al.
patent: 4238310 (1980-12-01), Eckler et al.
patent: 4246088 (1981-01-01), Murphy et al.
patent: 4259166 (1981-03-01), Whitehurst
patent: 4287029 (1981-09-01), Shimamura
patent: 4304641 (1981-12-01), Grandia et al.
patent: 4323433 (1982-04-01), Loch
patent: 4341629 (1982-07-01), Uhlinger
patent: 4360410 (1982-11-01), Fletcher et al.
patent: 4378283 (1983-03-01), Seyffert
patent: 4384930 (1983-05-01), Eckles
patent: 4391694 (1983-07-01), Runsten
patent: 4422915 (1983-12-01), Wielonski et al.
patent: 4431361 (1984-02-01), Bayne
patent: 4437943 (1984-03-01), Beck
patent: 4440597 (1984-04-01), Wells et al.
patent: 4443117 (1984-04-01), Muramoto et al.
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4451197 (1984-05-01), Lange
patent: 4463503 (1984-08-01), Applegate
patent: 4466864 (1984-08-01), Bacon
patent: 4469566 (1984-09-01), Wray
patent: 4475823 (1984-10-01), Stone
patent: 4480028 (1984-10-01), Kato et al.
patent: 4495153 (1985-01-01), Midorikawa
patent: 4495453 (1985-01-01), Inaba
patent: 4500394 (1985-02-01), Rizzo
patent: 4529480 (1985-07-01), Trokhan
patent: 4541895 (1985-09-01), Albert
patent: 4566847 (1986-01-01), Maeda
patent: 4576685 (1986-03-01), Goffredo et al.
patent: 4576689 (1986-03-01), Makkaev
patent: 4585539 (1986-04-01), Edson
patent: 4604177 (1986-08-01), Sivilotti
patent: 4604178 (1986-08-01), Fiegener
patent: 4634503 (1987-01-01), Nogavich
patent: 4639028 (1987-01-01), Olson
patent: 4648944 (1987-03-01), George et al.
patent: 4670126 (1987-06-01), Messer et al.
patent: 4685414 (1987-08-01), DiRico
patent: 4687552 (1987-08-01), Early et al.
patent: 4693017 (1987-09-01), Oehler et al.
patent: 4696729 (1987-09-01), Santini
patent: 4715934 (1987-12-01), Tamminen
patent: 4741624 (1988-05-01), Barroyer
patent: 4760671 (1988-08-01), Ward
patent: 4761214 (1988-08-01), Hinman
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4781800 (1988-11-01), Goldman
patent: 4800818 (1989-01-01), Kawaguchi et al.
patent: 4828654 (1989-05-01), Reed
patent: 4849054 (1989-07-01), Klowak
patent: 4858539 (1989-08-01), Schumann
patent: 4864239 (1989-09-01), Casarcia et al.
patent: 4868992 (1989-09-01), Crafts et al.
patent: 4898647 (1990-02-01), Luce et al.
patent: 4902398 (1990-02-01), Homstad
patent: 4906341 (1990-03-01), Yamakawa
patent: 4913085 (1990-04-01), Vohringer et al.
patent: 4924890 (1990-05-01), Giles et al.
patent: 4944650 (1990-07-01), Matsumoto
patent: 4949671 (1990-08-01), Davis et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4959278 (1990-09-01), Shimauch
patent: 4962726 (1990-10-01), Matsushita et al.
patent: 4979464 (1990-12-01), Kunze-Concewitz et al.
patent: 4988533 (1991-01-01), Freeman et al.
patent: 5000827 (1991-03-01), Schuster
patent: 5024746 (1991-06-01), Stierman et al.
patent: 5026239 (1991-06-01), Chiba
patent: 5048589 (1991-09-01), Cook et al.
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5055036 (1991-10-01), Asano et al.
patent: 5061144 (1991-10-01), Akimoto
patent: 5069548 (1991-12-01), Boehnlein
patent: 5078852 (1992-01-01), Yee
patent: 5083364 (1992-01-01), Olbrich et al.
patent: 5096550 (1992-03-01), Mayer
patent: 5110248 (1992-05-01), Asano et al.
patent: 5115430 (1992-05-01), Hahne
patent: 5125784 (1992-06-01), Asano
patent: 5128912 (1992-07-01), Hug et al.
patent: 5135636 (1992-08-01), Yee et al.
patent: 5138973 (1992-08-01), Davis et al.
patent: 5146136 (1992-09-01), Ogura
patent: 5151168 (1992-09-01), Gilton
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5156174 (1992-10-01), Thompson
patent: 5156730 (1992-10-01), Bhatt
patent: 5168886 (1992-12-01), Thompson et al.
patent: 5168887 (1992-12-01), Thompson
patent: 5169408 (1992-12-01), Biggerstaff et al.
patent: 5172803 (1992-12-01), Lewin
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5178512 (1993-01-01), Skrobak
patent: 5178639 (1993-01-01), Nishi
patent: 5180273 (1993-01-01), Salaya et al.
patent: 5183377 (1993-02-01), Becker et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5209817 (1993-05-01), Ahmad
patent: 5217586 (1993-06-01), Datta
patent: 5222310 (1993-06-01), Thompson
patent: 5227041 (1993-07-01), Brogden
patent: 5228232 (1993-07-01), Miles
patent: 5228966 (1993-07-01), Murata
patent: 5230371 (1993-07-01), Lee
patent: 5232511 (1993-08-01), Bergman
patent: 5235995 (1993-08-01), Bergman et al.
patent: 5238500 (1993-08-01), Bergman
patent: 5252137 (1993-10-01), Tateyama et al.
patent: 5252807 (1993-10-01), Chizinsky
patent: 5256262 (1993-10-01), Blomsterberg
patent: 5256274 (1993-10-01), Poris
patent: 5271953 (1993-12-01), Litteral
patent: 5271972 (1993-12-01), Kwok et al.
patent: 5301700 (1994-04-01), Kamikawa et al.
patent: 5302464 (1994-04-01), Nomura
patent: 5306895 (1994-04-01), Ushikoshi et al.
patent: 5314294 (1994-05-01), Taniguchi
patent: 5316642 (1994-05-01), Young
patent: 5326455 (1994-07-01), Kubo et al.
patent: 5330604 (1994-07-01), Allum et al.
patent: 5332271 (1994-07-01), Grant et al.
patent: 5332445 (1994-07-01), Bergman
patent: 5340456 (1994-08-01), Mehler
patent: 5344491 (1994-09-01), Katou
patent: 5348620 (1994-09-01), Hermans et al.
patent: 5364504 (1994-11-01), Smurkoski et al.
patent: 5366785 (1994-11-01), Sawdai
patent: 5366786 (1994-11-01), Connor et al.
patent: 5368711 (1994-11-01), Poris
patent: 5368715 (1994-11-01), Hurley et al.
patent: 5372848 (1994-12-01), Blackwell
patent: 5376176 (1994-12-01), Kuriyama
patent: 5377708 (1995-01-01), Bergman
patent: 5388945 (1995-02-01), Garric et al.
patent: 5391285 (1995-02-01), Lytle
patent: 5391517 (1995-02-01), Gelatos et al.
patent: 5405518 (1995-04-01), Hsieh et al.
patent: 5411076 (1995-05-01), Matsunaga et al.
patent: 5421987 (1995-06-01), Tzanavaras et al.
patent: 5427674 (1995-06-01), Langenskiold et al.
patent: 5429686 (1995-07-01), Chiu et al.
patent: 5429733 (1995-07-01), Ishida
patent: 5431803 (1995-07-01), DiFranco et al.
patent: 5437777 (1995-08-01), Kishi
patent: 5441629 (1995-08-01), Kosaki
patent: 5442416 (1995-08-01), Tateyama et al.
patent: 5443707 (1995-08-01), Mori
patent: 5445484 (1995-08-01), Kato et al.
patent: 5447615 (1995-09-01), Ishida
patent: 5454405 (1995-10-01), Hawes
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5464313 (1995-11-01), Ohsawa
patent: 5472502 (1995-12-01), Batchelder
patent: 5489341 (1996-02-01), Bergman et al.
patent: 5500081 (1996-03-01), Bergman
patent: 5501768 (199
McHugh Paul R.
Ritzdorf Thomas L.
Weaver Robert A.
Wilson Gregory J.
Patel Ramesh
Perkins Coie LLP
Semitool Inc.
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