Tungsten metallization

Details Tungsten metallization Tungsten metallization

1990-04-30

1993-07-13

Quach, T. N.

Fishing, trapping, and vermin destroying

437190, 437194, 437246, H01L 21283

Patent

active

052273350

ABSTRACT:
The adhesion of tungsten to an underlying dielectric layer is improved by the use of a thin glue layer of either TiN or Al.

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