Wave transmission lines and networks – Automatically controlled systems – Impedance matching
Reexamination Certificate
2011-01-04
2011-01-04
Jones, Stephen E (Department: 2817)
Wave transmission lines and networks
Automatically controlled systems
Impedance matching
Reexamination Certificate
active
07863996
ABSTRACT:
An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
REFERENCES:
patent: 4679007 (1987-07-01), Reese et al.
patent: 5793162 (1998-08-01), Barnes et al.
patent: 7332980 (2008-02-01), Zhu et al.
patent: 2010/0164641 (2010-07-01), McKinzie, III
Cotter Daniel H.
Harnett Sean O.
Harness & Dickey & Pierce P.L.C.
Jones Stephen E
MKS Instruments Inc.
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