Optical: systems and elements – Light interference – Electrically or mechanically variable
Reexamination Certificate
2006-03-14
2006-03-14
Assaf, Fayez G. (Department: 2872)
Optical: systems and elements
Light interference
Electrically or mechanically variable
C359S577000, C359S587000, C359S589000
Reexamination Certificate
active
07012752
ABSTRACT:
An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
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Choi Chang Auck
Jun Chi Hoon
Kim Chang Kyu
Kim Youn Tae
Lee Myung Lae
Assaf Fayez G.
Blakely & Sokoloff, Taylor & Zafman
Electronics and Telecommunications Research Institue
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