Tunable resonator with MEMS element

Wave transmission lines and networks – Coupling networks – Frequency domain filters utilizing only lumped parameters

Reexamination Certificate

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Details

C333S017100, C333S235000, C333S132000, C455S077000

Reexamination Certificate

active

07339446

ABSTRACT:
According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.

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patent: 2004/0183624 (2004-09-01), Liang et al.
patent: 2005/0017329 (2005-01-01), Hayworth et al.
patent: 2006/0001123 (2006-01-01), Heck et al.

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