Optics: measuring and testing – By light interference – Having partially reflecting plates in series
Reexamination Certificate
2006-02-21
2006-02-21
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having partially reflecting plates in series
Reexamination Certificate
active
07002697
ABSTRACT:
An optical instrument including: a thermo-optically tunable, thin film, free-space interference filter having a tunable passband which functions as a wavelength selector, the filter including a sequence of alternating layers of amorphous silicon and a dielectric material deposited one on top of the other and forming a Fabry-Perot cavity structure having: a first multi-layer thin film interference structure forming a first mirror; a thin-film spacer layer deposited on top of the first multi-layer interference structure, the thin-film spacer layer made of amorphous silicon; and a second multi-layer thin film interference structure deposited on top of the thin-film spacer layer and forming a second mirror; a lens for coupling an optical beam into the filter; an optical detector for receiving the optical beam after the optical beam has interacted with the interference filter; and circuitry for heating the thermo-optically tunable interference filter to control a location of the passband.
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Domash Lawrence H.
Ma Eugene Y.
Murano Robert
Nemchuk Nikolay
Payne Adam M.
Aegis Semiconductor, Inc.
Lyons Michael A.
Toatley , Jr. Gregory J.
Wilmer Cutler Pickering Hale and Dorr LLP
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