Tunable optical filter with heater on a CTE-matched...

Details Tunable optical filter with heater on a CTE-matched... Tunable optical filter with heater on a CTE-matched...

2007-12-04

2007-12-04

Chang, Audrey Y. (Department: 2872)

Optical: systems and elements

Light interference

Electrically or mechanically variable

C359S579000, C359S577000

Reexamination Certificate

active

10960764

ABSTRACT:
An optical device including: a glass substrate; a crystalline silicon layer bonded to the glass substrate; and a thermally tunable thin-film optical filter fabricated on top of the crystalline silicon layer.

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