Tunable micro electromechanical inductor

Details Tunable micro electromechanical inductor Tunable micro electromechanical inductor

2007-09-04

2010-06-22

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000

Reexamination Certificate

active

07741936

ABSTRACT:
The present invention provides a monolithic inductor developed using radio frequency micro electromechanical (RF MEMS) techniques. In a particular embodiment of the present invention, a tunable radio frequency microelectromechanical inductor includes a coplanar waveguide and a direct current actuatable contact switch positioned to vary the effective width of a narrow inductive section of the center conductor of the CPW line upon actuation the DC contact switch. In a specific embodiment of the present invention, the direct current actuatable contact switch is a diamond air-bridge integrated on an alumina substrate to realize an RF switch in the CPW and microstrip topology.

REFERENCES:
Balachandran et al., MEMS Tunable Planar Inductors Using DC-Contact Switches, 34th European Microwave Conference, 2004, pp. 713-716.

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