Tunable micro electromechanical inductor

Details Tunable micro electromechanical inductor Tunable micro electromechanical inductor

2007-09-25

2007-09-25

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000

Reexamination Certificate

active

11162421

ABSTRACT:
The present invention provides a monolithic inductor developed using radio frequency micro electromechanical (RF MEMS) techniques. In a particular embodiment of the present invention, a tunable radio frequency microelectromechanical inductor includes a coplanar waveguide and at least one direct current actuatable contact switch positioned to vary the effective width of a narrow inductive section of the center conductor of the CPW line upon actuation the DC contact switch.

REFERENCES:
Balachandran et al., MEMS Tunable Planar Inductors Using DC-Contact Switches, Oct. 2004, 34th European Microwave Conference, 713-716.
J.M. Deii et al. Variable MEMS-Based Inductors Fabricated From Pecvd Silicon Nitride, 2002 pp. 567-570.
Xi-Nig Wang et al., Fabrication and Performance of a Novel Suspended Rf Spinal Inductor, IEEE Transactions on Electron Devices, May 2004, pp. 814-816, vol. 51, No. 5.
N.Sarkar et al., Microassembled Tunable MEMS Inductor, 2005, pp. 183-186.
C.M Tassetti et al., Tunable RF MEMS microinductors for future communication systems, 2003, pp. 541-545.
Chia-Ying Lee et al., The Enhanced Q Spiral Inductors with MEMS Technology for RF Applications.
Jean-Baptiste David et al., RF High-Q Spiral Inductor Design, 2001, pp. 78-81.
A.J. Pang et al., Flip Chip Assembly of MEMS Inductors, 2003, pp. 298-300.
I. Zine-El-Abidine et al., A Turnable RF MEMS Inductor, 2004.
Dimitrios Peroulis et al., Tunable Lumped Components with Applications to Reconfigurable MEMS Filters, 2001 pp. 341-344.
Dimitrios Peroulis et al., MEMS Devices For High Isolation Switching And Tunable Filtering, 2000, pp. 1217-1220.
R.R. Mansour et al., RF MEMS Devices, 2003.

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