Tunable MEMS capacitor

Details Tunable MEMS capacitor Tunable MEMS capacitor

2005-10-11

2005-10-11

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S310000, C361S287000, C361S278000

Reexamination Certificate

active

06954348

ABSTRACT:
Various embodiments of tunable capacitors are disclosed. One embodiment is in the form of a tunable capacitor (368) having a pair of stationary capacitor electrodes (392) that are fixed to and disposed the same distance above a substrate (388) in the vertical dimension. A tuning element (416) is suspended above the substrate (388) by an elevation system (460) that accommodates movement of the tuning element (416) in the vertical dimension. Changing the capacitance of the tunable capacitor (368) is accomplished by moving the tuning element (416) in the vertical dimension.

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patent: 6741449 (2004-05-01), Pasternak

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