Coherent light generators – Particular active media – Gas
Reexamination Certificate
2006-07-11
2006-07-11
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S057000, C372S060000, C372S058000, C372S059000
Reexamination Certificate
active
07075963
ABSTRACT:
A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the enclosure is adjusted for tuning the wavelength. Preferably, the pressure is controlled by controlling the flow of an inert gas through the enclosure. A pump may be used, or an overpressure flow may be used. Alternatively, a prism of the beam expander or an etalon may be rotatable for tuning the wavelength.
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Basting Dirk
Kleinschmidt Juergen
Kramer Matthias
Schröeder Thomas
Stamm Uwe
Harvey Minsun Oh
Lambda Physik AG
Nguyen Dung
Stallman & Pollock LLP
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