Tunable inter-digital capacitor and method of manufacturing...

Details Tunable inter-digital capacitor and method of manufacturing... Tunable inter-digital capacitor and method of manufacturing...

2007-04-24

2010-06-15

Thomas, Eric (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S303000

Reexamination Certificate

active

07738237

ABSTRACT:
Provided are a tunable inter-digital capacitor (IDC) and a method of manufacturing the same. The tunable IDC includes: a first dielectric layer formed on a substrate and having electrode pattern grooves of an IDC including a ground line and a signal line formed therein; electrode metal patterns formed in the electrode pattern grooves of the IDC including the ground line and the signal line formed in the first dielectric layer; and a second dielectric layer formed on an upper surface of the first dielectric layer to cover all of the electrode metal patterns except for parts of the ground and signal lines. Therefore, it is possible to increase tunability of the IDC and reduce drive voltage.

REFERENCES:
patent: 6266226 (2001-07-01), Hayashi
patent: 6356429 (2002-03-01), Hayashi
patent: 2001/0028545 (2001-10-01), Hayashi
patent: 2005/0092845 (2005-05-01), Forster
Lee et al., “Reconfigurable Inter-Digital Capacitor Embedded in BZN Thin Film Dielectrics for Microwave Applications”, Korean Electromagnetic Engineering Society, Jun. 16, 2006, pp. 183-186.
Lee et al., “Very High Tunable Inter-Digital Capacitor Using Bismuth Zinc Niobate (BZN) Thin Film Dielectrics for Microwave Applications”, Korean Electronics Letter, Jul. 20, 2006, pp. 851-853, vol. 42, No. 15.
Ko et al., “Phase Decomposition and Dielectric Properties of Reactively Sputtered Bismuth Zinc Niobate Pyrochlore Thin Films Deposited from Monoclinic Zirconolite Target”, Journal of Electroceramics, 2005, pp. 171-175, vol. 14.

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