Tunable filter, manufacturing method thereof and optical...

Details Tunable filter, manufacturing method thereof and optical... Tunable filter, manufacturing method thereof and optical...

2005-10-11

2005-10-11

Ullah, Akm Enayet (Department: 2874)

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

C359S578000, C359S587000, C359S589000, C359S590000, C356S454000

Reexamination Certificate

active

06954294

ABSTRACT:
The invention provides a tunable filter that can minimize adjacent channel cross talk despite an increase of a number of available wavelengths and quickly switch a wavelength to be used, and manufacturing method thereof, and also an optical switching device comprising such tunable filter. In a tunable filter having a Fabry-Perot etalon structure, not less than two cavity gaps114to116are provided and separation between the cavity gaps is controlled by any of electrostatic drive, electromagnetic drive or piezoelectric drive. In this case, the cavity gaps can be formed through the steps of forming a sacrificial layer in advance where a cavity gap is to be formed; forming a plurality of optical multilayer films100to103; and removing the sacrificial layer by etching. Substrates107and109are combined through a supporting column108.

REFERENCES:
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patent: 5739945 (1998-04-01), Tayebati
patent: 2002/0167730 (2002-11-01), Needham et al.
patent: 2003/0031221 (2003-02-01), Wang et al.
patent: 2004/0075845 (2004-04-01), Chang
patent: 2004/0109250 (2004-06-01), Choi et al.
patent: 11-142752 (1999-05-01), None
patent: 2001-221913 (2001-08-01), None

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