Tunable Fabry-Perot interferometer with floating electrode on on

Details Tunable Fabry-Perot interferometer with floating electrode on on Tunable Fabry-Perot interferometer with floating electrode on on

1998-09-02

2000-06-20

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

060783958

ABSTRACT:
An electrostatically controlled, tunable Fabry-Perot interferometer is provided with a first, fixed mirror (4) to which a floating electrode (2) is fitted, a second, movable mirror (6) to which first and second control electrodes (8, 10) are fitted, and a resonant cavity of length d, defined by the first and second mirrors. The application of an electrical voltage between the two control electrodes operates to cause displacement of the movable mirror in relation to the fixed mirror, thereby modifying the length of the resonant cavity of the Fabry-Perot interferometer.

REFERENCES:
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 5561523 (1996-10-01), Bloomberg et al.
patent: 5646729 (1997-07-01), Koskinen et al.
patent: 5909280 (1999-06-01), Zavracky
Jerman et al, "A Miniature Fabry-Perot Interferometer Fabricated Using Silicon Micromachining Techniques", IEEE, 1988, pp16-18.
"Electrically Tunable Micromachined Fabry-Perot Interferometer In Gas Analysis", M. Blomberg, A. Torkkeli and A. Lehto, published in "Physica Scripta", vol. T69, pp. 119-121, 1997.
"Carbon Dioxide Sensor Based On Micromachined Fabry-Perot Interferometer", M. Viitasalo, M. Hohtola, M. Blomberg, Ch. Helenelund, A. Torkkeli, and A. Lehto, published in "Sensor 97", poster A7.36, pp. 193-198.

Affiliated with

Also associated with

Rating

Tunable Fabry-Perot interferometer with floating electrode on on does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Tunable Fabry-Perot interferometer with floating electrode on on, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tunable Fabry-Perot interferometer with floating electrode on on will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1857826