Tunable cavity resonator and method for fabricating same

Details Tunable cavity resonator and method for fabricating same Tunable cavity resonator and method for fabricating same

2011-08-23

2011-08-23

Porta, David P (Department: 2884)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C250S338100, C372S020000

Reexamination Certificate

active

08003427

ABSTRACT:
An example tunable cavity resonator for filtering radiation in the optical and IR wavelengths and an example method for fabricating same. The example resonator includes a pair of reflectors, one in fixed relationship to a substrate and the other formed upon a suspended moveable membrane disposed a cavity length from the one reflector. The resonator also includes a pair of spaced apart electrodes either constituted by the reflectors or juxtaposed therewith, which are electrostatically operable to move the membrane and other reflector relative to the one reflector.

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