Tunable capacitor and method of fabricating the same

Details Tunable capacitor and method of fabricating the same Tunable capacitor and method of fabricating the same

2006-01-31

2006-01-31

Thomas, Eric (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S278000, C361S301200

Reexamination Certificate

active

06992878

ABSTRACT:
A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.

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Jan Y. Park et al., “Micromachined RF MEMS Tunable Capacitors Using Piezoelectric Actuators”, IEEE International Microwave Symposium, 2002.
Charles L. Goldsmith et al., “RF MEMS Variable Capacitors for Tunable Filters”, Wiley RF Microwave Computer Aided Design, 1999, pp. 362-374.

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