Tubular oven

Details Tubular oven Tubular oven

1976-04-13

1977-02-08

Mayewsky, Volodymyr Y.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

13 25, 219531, 219539, 219553, F27D 1102

Patent

active

040073696

ABSTRACT:
An improved tubular oven adapted for use in diffusion processing of semiconductors whose interior walls are comprised of polycrystalline silicon and whose exterior walls are comprised of phosphorous doped silicon. Block electrical contacts are located at opposed ends of such tubular oven and are comprised of conductive metal and graphite. A layer of thermal insulation circumscribes mid regions of such tubular oven.

REFERENCES:
patent: 2768277 (1956-10-01), Buch et al.
patent: 2851579 (1958-09-01), Pfeiffer
patent: 3436171 (1969-04-01), Neichselbaum et al.
patent: 3641249 (1972-02-01), Higgins
patent: 3776809 (1973-12-01), Baumler
patent: 3823685 (1973-10-01), Koepp
patent: 3851150 (1974-11-01), Holzen
patent: 3962670 (1976-06-01), Dietze

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