Tristertbutoxyphenyl sulfonium tosylate compound

Details Tristertbutoxyphenyl sulfonium tosylate compound Tristertbutoxyphenyl sulfonium tosylate compound

1995-01-27

1997-05-27

Young, Christopher G.

Organic compounds -- part of the class 532-570 series

Organic compounds

Sulfur containing

568 27, 568 28, 568 34, 568 35, 568 36, C07C31900

Patent

active

056334095

ABSTRACT:
Trifluoromethanesulfonic and p-toluenesulfonic acid bis- or tris(p-tert-butoxyphenyl)sulfonium salts are novel. They are prepared from bis(p-tert-butoxyphenyl)sulfoxide which is also novel. A chemically amplified positive resist composition which contains the sulfonium salt as a photo-acid generator is highly sensitive to deep-UV rays, electron beams and X-rays, can be developed with alkaline aqueous solution to form a pattern, and is thus suitable for use in a fine patterning technique.

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Chemical Abstract 123:325759. (Date).
Chemical Abstract 123:301551. (Date).
European Search Report dated May 31, 1995.
Chemical registry 157089-24-2 print-out.

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