Compositions: ceramic – Ceramic compositions – Refractory
Patent
1993-04-12
1994-09-27
Group, Karl
Compositions: ceramic
Ceramic compositions
Refractory
428698, 219553, C04B 3558
Patent
active
053507207
ABSTRACT:
An improved double-layered ceramic heater, which is used for heating a semiconductor silicon wafer mounted thereon in the processing of semiconductor devices, is proposed to be freed from the problems in the prior art ceramic heaters in respects of service life and contamination of silicon wafers mounted thereon. Different from conventional ceramic heaters having a ceramic substrate plate of, for example, boron nitride provided with a heater element layer of a metal foil, the inventive ceramic heater has a substrate plate of silicon nitride and a heater element layer of graphite is formed thereon by the CVD method so that the ceramic heater is not responsible for contamination of semiconductor silicon by virtue of absence of any element which can be a disturbing dopant of the semiconductor. The problem of contamination with carbon can be solved by further providing a coating layer of silicon nitride by the CVD method.
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patent: 4783368 (1988-11-01), Yamamoto et al.
patent: 4783369 (1988-11-01), Sugaya et al.
patent: 4967058 (1990-10-01), Yamazaki et al.
patent: 5233166 (1993-08-01), Maeda
patent: 5239612 (1993-08-01), Morris
patent: 5264681 (1993-11-01), Nozaki et al.
Harada Kesazi
Itou Kenji
Kawada Nobuo
Kubota Yoshihiro
Group Karl
Shin-Etsu Chemical Co. , Ltd.
Wright A.
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