Trimming a MEMS device to fine tune natural frequency

Details Trimming a MEMS device to fine tune natural frequency Trimming a MEMS device to fine tune natural frequency

2007-01-23

2009-11-10

Hasan, Mohammad (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07616371

ABSTRACT:
A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

REFERENCES:
patent: 6912078 (2005-06-01), Kudrle et al.
patent: 7034370 (2006-04-01), Kuo
patent: 2004/0060898 (2004-04-01), Tsai
International Preliminary Report on Patentability, 5 pages.

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