Trimmable capacitor

Details Trimmable capacitor Trimmable capacitor

1995-07-12

1997-02-18

Picard, Leo P.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

361271, 361278, H01G 5011

Patent

active

056046588

ABSTRACT:
In a multilayer metallisation/dielectric structure on a silicon substrate a trimmable capacitor is formed between two of the higher metallisation layers, with one layer being segmented and the individual segments connected by way of one or more vias and respective narrow links to one terminal of the capacitor. The narrow links are formed from titanium tungsten on the oxide isolated silicon substrate.

REFERENCES:
patent: 4190854 (1980-02-01), Redfern
patent: 4470096 (1984-09-01), Guertin

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