Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1999-02-17
1999-07-27
Nazario-Gonzalez, Porririo
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
427587, 427588, 4272481, C07F 1702, C07F 1500, C23C 1600
Patent
active
059292679
ABSTRACT:
A Pt compound which is in the form of a liquid at room temperature for producing Pt films usable as electrode films in semiconductor devices by the CVD method; a process for producing the compound; and a process for producing films with the use of the same.
A novel compound trimethyl(ethylcyclopentadienyl)platinum (C.sub.2 H.sub.5 C.sub.5 H.sub.4)Pt(CH.sub.3).sub.3 is in the form of a liquid at room temperature and shows a sufficient vapor pressure at around 35.degree. C. Thus, it can be quantitatively supplied by gas bubbling or with the use of a liquid mass flow controller as a feedstock in the CVD method and thermally decomposed on a substrate at 150.degree. C. in a hydrogen atmosphere to give pure Pt films. This compound can be produced at a high yield by reacting iodotrimethylplatinum with sodium ethylcyclopentadienide in a solvent.
REFERENCES:
patent: 5104684 (1992-04-01), Tao et al.
patent: 5130172 (1992-07-01), Hicks et al.
patent: 5403620 (1995-04-01), Kaesz
patent: 5783716 (1998-07-01), Baum et al.
Fattibene Arthur T.
Fattibene Paul A.
Kabushikikaisha Kojundokagaku Kenkyusho
Nazario-Gonzalez Porririo
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