Trim structure for integrated capacitors

Details Trim structure for integrated capacitors Trim structure for integrated capacitors

1978-02-15

1980-02-26

Larkins, William D.

Electric heating

Microwave heating

Tunnel furnace

219121LM, 361271, 357 67, H01L 2700

Patent

active

041908546

ABSTRACT:
A capacitor suitable for integration into a monolithic integrated circuit is fabricated in two parallel connected sections. One section, using a thin oxide, constitutes most of the capacitance. A second section fabricated on a thick oxide constitutes a smaller capacitance per unit area but can be laser trimmed to provide a precise capacitance without damage to the integrated circuit. The trimmable section is desirably made using a conductive electrode material that is readily removed with laser energy.

REFERENCES:
patent: 3330696 (1967-07-01), Ullery et al.
patent: 3860836 (1975-01-01), Pedersen
patent: 3890631 (1975-06-01), Tiemann
patent: 4001869 (1977-01-01), Brown
patent: 4016483 (1977-04-01), Rudin
patent: 4017885 (1977-04-01), Kendall et al.

Affiliated with

Also associated with

Rating

Trim structure for integrated capacitors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Trim structure for integrated capacitors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Trim structure for integrated capacitors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2115391