Tricholine phosphate surface treating agent

Details Tricholine phosphate surface treating agent Tricholine phosphate surface treating agent

1988-08-11

1990-06-05

Pal, Asok

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 29, 134 38, 134 42, 156637, 156655, 156656, 156665, 156668, 252 795, 252156, 252541, B08B 308

Patent

active

049311034

ABSTRACT:
The use of tricholine phosphate, tris [(2-hydroxyethyl) trimethylammonium] phosphate as a surface treating agent employed during the manufacture of printed wire boards, semiconductors and the like, particularly as a stripper for photoresists and as a cleaner for silicon wafers, furnace tubes and the like.

REFERENCES:
patent: 3887450 (1975-06-01), Giliano et al.
patent: 4202703 (1980-05-01), Zuber et al.
patent: 4239661 (1980-12-01), Muraoka et al.
patent: 4294911 (1981-10-01), Guild
patent: 4339340 (1982-07-01), Muraoka et al.
patent: 4379830 (1983-04-01), Deutsch et al.
patent: 4464461 (1984-08-01), Guild
patent: 4530895 (1985-06-01), Simon et al.
patent: 4686002 (1987-08-01), Tasset

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